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I’m more familiar with the MS side. Here is my list of schools that offer dedicated data science/ML programs:
I have to point out that, if your goal is some career in data science/ML, programs in CS or Statistics could help you achieve this as well. Then your options are much broader - UC Berkeley, MIT, University of Washington, UIUC, etc.
You can check the following link for a full list of Universities programs,. In addition, the blog has very rich information in the field of data science.
If you prefer online learning, I’d recommend you. It’s very organized, material is very good, and of course for FREE!
Also, you can check this Learning Path for the fields you need to know to get yourself into Data Science.